Nonlinearity in a fiber-optic coupled heterodyne interferometer

نویسنده

  • Liang Zhang
چکیده

A high-accuracy (nonlinearity < 2nm) fiber-optic coupled displacement heterodyne measuring Michelson interferometer is developed. The primary limitation of accuracy encountered with this fiber-optic coupled heterodyne interferometer is the optical mixing arising from the imperfection of fiber-optic coupling system. The optical mixing results in the nonlinearity (first order and second order errors) in the displacement measurement of the interferometer. A theoretical model using Jones calculus is developed; the corresponding experiments are implemented. The theoretical results are consistent with the experimental results.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Validation of separated source frequency delivery for a fiber-coupled heterodyne displacement interferometer.

The use of optical fibers presents several advantages with respect to free-space optical transport regarding source-frequency delivery to individual heterodyne interferometers. Unfortunately, fiber delivery to individual coaxial heterodyne interferometers leads to an increase of (periodic) nonlinearity in the measurement, because transporting coaxial frequencies through one optical fiber leads ...

متن کامل

Optical mixing errors in a fiber-optic coupled heterodyne interferometer

A lightweight and electrically passive interferometer is demanded by a number of applications for precision metrology such as machine tool metrology and on-machine feedback [1]. To satisfy these requirements, a fiber-optic coupled heterodyne displacement measuring Michelson interferometer (FIDMI) shown in Fig.1 has been developed in the Center of Precision Metrology (CPM) at the University of N...

متن کامل

Modeling of measurement error in refractive index determination of fuel cell using neural network and genetic algorithm

Abstract: In this paper, a method for determination of refractive index in membrane of fuel cell on basis of three-longitudinal-mode laser heterodyne interferometer is presented. The optical path difference between the target and reference paths is fixed and phase shift is then calculated in terms of refractive index shift. The measurement accuracy of this system is limited by nonlinearity erro...

متن کامل

Mathematically modeling of target speed effect on nonlinearity in DTLMI-based nano-metrology system

Jones matrix computation is one of the widely used methods in nonlinearitycalculation in laser interferometers. In this paper, the nonlinearity error in developedthree-longitudinal mode heterodyne interferometer (DTLMI) has been mathematicallymodeled at various speeds, by using Jones matrix calculations. This review has been donedespite the fact that simultaneously the main factors including no...

متن کامل

New Inchworm type Actuator with I/Q heterodyne Interferometer Feedback for a Long Stroke Precision Stage

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2004